Products List

Microscopes

Laser Microscopes

OPTELICS® HYBRID+

Laser Microscopes

OPTELICS® HYBRID+

OPTELICS AI²

Confocal Microscope Automatic Inspection/Review System

OPTELICS AI²

OPTELICS IR

IR Confocal Microscope

OPTELICS IR

Electro-Chemical Reaction Visualizing Confocal System

ECCS B320

Electro-Chemical Reaction Visualizing Confocal System

ECCS B320

Ultra High Temperature Observation Laser Microscope System

VL3000DX-SVF18SP

Ultra High Temperature Observation Laser Microscope System

VL3000DX-SVF18SP

Semiconductor Mask Inspection Equipment

Mask Manufacturing

Regular Inspection
ACTIS A300 Series

Actinic EUV Pattern Mask Defect Inspection Equipment

ACTIS A300 Series

MATRICS X9ULTRA Series

Mask Inspection Equipment

MATRICS X9ULTRA Series

MATRICS X810EX Series

Mask Defect Inspection Equipment

MATRICS X810EX Series

ACTIS A150

Actinic EUV Pattern Mask Defect Inspection Equipment

ACTIS A150

MZ100

Mask Edge Inspection Equipment

MZ100

MATRICS X8ULTRA Series

Mask Inspection Equipment

MATRICS X8ULTRA Series

MATRICS X800LITE Series

Mask Defect Inspection Equipment

MATRICS X800LITE Series

Shipping Inspection
PELMIS Series

EUV Pellicle Foreign Matter Inspection Equipment

PELMIS Series

MPM248

Phase Shift Amount Measurement Equipment

MPM248

MPM193EX

Phase Difference/Transmittance Measurement Equipment

MPM193EX

MRS193EX

Mask Defect Review Equipment

MRS193EX

Blank Manufacturing

Acceptance Inspection
MAGICS Series M6750/M6751

Mask Blank Defect Inspection/Review Equipment

MAGICS Series M6750/M6751

Shipping Inspection
MAGICS Series M9650/M9651

Mask Blank Defect Inspection/Review Equipment

MAGICS Series M9650/M9651

ABICSシリーズ E320

EUVマスクブランクス欠陥検査/レビュー装置

ABICSシリーズ E320

ABICSシリーズ E120

EUVマスクブランクス欠陥検査/レビュー装置

ABICSシリーズ E120

Device Manufacturing

Regular Inspection
CIRIUS Series

High Sensitivity Under-layer Defect Inspection and Review System

CIRIUS Series

BASIC Series

EUV Mask Backside Inspection and Cleaning System

BASIC Series

MATRICS X9ULTRA Series

Mask Inspection System

MATRICS X9ULTRA Series

MATRICS X8ULTRA Series

Mask Inspection System

MATRICS X8ULTRA Series

MATRICS X810EX Series

Mask Inspection System

MATRICS X810EX Series

MATRICS X800LITE Series

Mask Inspection System

MATRICS X800LITE Series

Via Process
VIANCA Series

Via Depth Measurement Equipment

VIANCA Series

BGM Series

TSV Backside Grinding Process Measurement Equipment

BGM Series

BIM Series

Wafer Fully Automatic Measurement Equipment

BIM Series

Lithography Process
LX Series

Multi-Wavelength Wafer Inspection Equipment

LX Series

CIEL Series

High-Sensitivity Wafer Edge Inspection Equipment

CIEL Series

Semiconductor Wafer Inspection Systems

Power Devices

SICA108

SiC Wafer Defect Inspection/Review System

SICA108

SICA88

SiC Wafer Defect Inspection/Review System

SICA88

GALOIS211

GaN Wafer Defect Inspection/Review System

GALOIS211

Wafers

EZ Series

Wafer Edge Shape Measurement System

EZ Series

MAGICS Series M5640

Wafer Defect Inspection/Review System

MAGICS Series M5640

Front-end Process

CIRIUS Series

High-Sensitivity Internal Defect Inspection/Review System

CIRIUS Series

VIANCA Series

Via Depth Measurement System

VIANCA Series

Middle-end Process

CIEL Series

High-Sensitivity Wafer Edge Inspection System

CIEL Series

BGM Series

TSV Backside Polishing Process Measurement System

BGM Series

BIM Series

Fully Automated Wafer Measurement System

BIM Series

Others

LX Series

Multi-Wavelength Wafer Inspection System

LX Series